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Laser
microcolumn technology is being used to develop direct-write
applications in semiconductor wafer manufacturing. Microcolumn
architecture uses laser devices with column lengths of several
millimeters, and offers high resolution, miniaturization,
and new source technology possibilities.
The technology
is being used to develop both direct write applications and
high-throughput mask patterning applications, and is being
incorporated into products around the 0.1 micron generation.
Kaman's
KD-5100 sensors are used in this technology to precisely position
the laser to allow exceptionally fine placement, critical
dimensions, and alignment control.
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