SMT-9700

Flexible, high-resolution position/displacement system for OEM applications

  • Nanometer to sub-nanometer resolution
  • 1, 2, and 3 channel configurations
  • Proprietary Pulse Width Modulation (PWM) circuitry for an inherently low noise floor
  • Small package size, ideal for OEM integration
  • Thirteen standard sensor options
  • Easy, cost-effective performance customization — sensor type/configuration, cable length, calibration range/offset, linearity, bandwidth, and temperature
  • 3-channel option tunes all channels off the same frequency, saving mounting cost and machine space
  • Requires only a single-ended power supply
  • 18-pin SIP (Single In-line Package) cards available for OEM integration
  • CE and RoHS compliant
Specifications
Resolution Nanometer to sub-nanometer (application dependent)
Channels 1, 2, or 3
Circuit Proprietary Pulse Width Modulation (PWM)
Electronics operating temperature 0°C to +70°C (+32° to +158°F)
Storage temperature -40°C to +85°C (-40° to +185°F)
Compensation range +15°C to +55°C (+59° to +131°F)
Sensor operating temperature Cryogenic to +400°F (+200°C), sensor dependent
Analog output Continuous load current <20 mA; short-circuit and overload protected; ranges 0-10, ±5, ±2.5 V
Input 15 to 30 Vdc; current limit <50 mA; reverse-polarity and short-circuit protection
Compliance CE and RoHS; I/O cables limited to 3 m to maintain CE marking
Sensors
Certifications

DECLARATION OF CONFORMITY

Model Number
SMT-9700 non-contact high-precision analog position measuring system

Conforms with Applicable Standards of:
Council Directive 89/336/EEC as amended by 92/31/EEC (EMC Directive)
Council Directive 73/23/EEC as amended by 93/68/EEC (LVD Directive)

EMC
EN 61326:2005 — Electrical Equipment for Measurement, Control and Laboratory Use

Lead-free, RoHS compliant, CE Marked design.

Options

Sensors — thirteen standard sensor options, plus custom sensor type, configuration, and cable length.

Channels — 1, 2, or 3 channel configurations; the 3-channel option tunes all channels together.

Calibration — custom calibration range, offset, linearity, bandwidth, and temperature optimization.

OEM integration — 18-pin SIP cards for integration into existing systems.

Accessories

Sensors, cables, and mounting hardware are available. Contact an applications engineer for configuration.

Frequently Asked Questions

What resolution does the SMT-9700 achieve?

Nanometer to sub-nanometer resolution, depending on the sensor, configuration, and calibration. Its proprietary PWM (phase-detection) circuit gives an inherently low noise floor compared with amplitude-based systems.

What channel configurations are available?

1, 2, or 3 channels. With the 3-channel option, all channels run off the same frequency and tune together — reducing mounting costs and machine space.

What are typical SMT-9700 applications?

XYZ stage position feedback in atomic force microscopy, Z-axis feedback in semiconductor photolithography, spindle position in precision grinding of bearing races, and optics positioning.