Stage Positioning

Stage Positioning commonly used in photolithography steppers and wafer inspection demand the utmost precision and repeatability. Kaman offers a range of sensors and conditioning electronics that are well suited for non-contact measurements in fab environments. Displacement resolution to nanometer levels with minimal hysteresis and thermal drift. The SMT-9700 conditioning electronics, and its predecessor, SMU-9000, have a long history of providing long term reliability and precision in this challenging OEM application.

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