Kaman ParallelPro™

Kaman Precision Measuring Systems introduces the latest product in our full line of measuring systems for the Semiconductor Manufacturing Equipment industry. The ParallelPro™ is the technologically upgraded successor to our industry standard showerhead leveling and gapping tool for 300mm series Chemical Vapor Deposition (CVD) process equipment.

New features and capabilities simplify the chamber set up process, eliminate potential sources of operator error, and require less technician movement around the machine, resulting in increased productivity and uptime. The app-based GUI displays setup parameters and status on an intuitively presented data layout, representing the actual chamber and leveling tool configuration. The ParallelPro™ creates a unique CVD machine set up experience that operators and technicians love!

Key features of the ParallelPro™ include:

  • Wireless Bluetooth® Low Energy (BLE) communication
  • Vacuum capable, field-replaceable battery power source
  • Up to 8 hours battery life per charge
  • User-friendly Android and iOS compatible App with data recording and storage
  • Upgraded, easy to use calibration verification GUI

Upgrade to the Kaman ParallelPro™ today!

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Measuring Range0.550” to 0.750”
Accuracy± .001”
Resolution± .0001”
Temp Compensation± 0.00005”
Op Temperature Range15 ℃ to 55 ℃
Battery life @ full charge> 6 hours
Application OSAndroid